Innovative SU-8 Lithography Techniques and Their Applications
نویسندگان
چکیده
منابع مشابه
Innovative SU-8 Lithography Techniques and Their Applications
SU-8 has been widely used in a variety of applications for creating structures in micro-scale as well as sub-micron scales for more than 15 years. One of the most common structures made of SU-8 is tall (up to millimeters) high-aspect-ratio (up to 100:1) 3D microstructure, which is far better than that made of any other photoresists. There has been a great deal of efforts in developing innovativ...
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In this paper, we present a technology for the batch-fabrication of fluidic devices which combines polymer and metal layers. The structures are fabricated by means of two-layer lithography and SU-8-based wafer bonding technique. The combination of SU-8 and metal layers allows the fabrication of “2(1/2)”-dimensional fluidic structures. We realized different types of micromixers for the investiga...
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Microfabrication advances have resulted in small, cheap, and precise devices for biological microelectromechanical systems (bioMEMS). SU-8/SU-8 2000 is an attractive material for these applications because of its high-aspect ratio fabrication capability, dielectric properties, and thermochemical stability. Despite these advantages, the potential toxicity of SU-8 2000 may limit its use in cell-b...
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Cells can secrete biotherapeutic molecules that can replace or restore host function. The transplantation of such cells is a promising therapeutic modality for the treatment of several diseases including type 1 diabetes mellitus. These cellular grafts are encapsulated in semipermeable and immunoisolative membranes to protect them from the host immune system, while allowing the transport of nutr...
متن کاملPerformance of SU-8 Membrane Suitable for Deep X-Ray Grayscale Lithography
In combination with tapered-trench-etching of Si and SU-8 photoresist, a grayscale mask for deep X-ray lithography was fabricated and passed a 10-times-exposure test. The performance of the X-ray grayscale mask was evaluated using the TERAS synchrotron radiation facility at the National Institute of Advanced Industrial Science and Technology (AIST). Although the SU-8 before photo-curing has bee...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2014
ISSN: 2072-666X
DOI: 10.3390/mi6010001